Design of Bulk-Micromachined Mechanical Sensors and Investigation of LIGA-Like Technology
博士 === 國立成功大學 === 機械工程學系碩博士班 === 90 === MEMS-based mechanical sensors such as pressure sensor and shear-stress sensor have been widely developed for the automotive industry, aerospace fields and biomedical applications. The design of microstructures and the improvement of the manufacturing technolog...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/8b98x9 |