Excimer Laser Ablation and Microdrilling of Polymers
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 90 === In this work, we use KrF Excimer Laser (wavelength: 248nm) to ablate polymers(PMMA、PI), develop a model to predict the ablation rate , and try to micro-machine high-aspect-ratio channels. We use photomultiplier and oscilloscope to measure temporal distribu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/w6pwbk |