Low dielectric constant material methylsilsesquiane (MSZ) for interconnect application
碩士 === 國立交通大學 === 材料科學與工程系 === 90 === In this thesis, we will investigate the integration of low-permittivity (low-k) Methylsilsesquiazane on interconnect technology. Methylsilsesquiazane (MSZ) is one class of organic polymers, which has a similar structure as Methylsilsesquixone (MSQ) an...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79824328755836722876 |