Poly-Si TFTs Fabricated by Electroless Plating Pd Induced Crystallization of Amorphous Si Thin Films
碩士 === 國立交通大學 === 材料科學與工程系 === 90 === In our previous work, a novel method, electroless plating Pd induced a-Si crystallization (EPIC), was used to replace the PVD Pd during MIC/MILC process. The crystallinity and film structure of MIC/MILC poly-Si by EPIC method had also been investigate...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15791725423933629973 |