Characterizations of Barium Strontium Titanate Thin Films Prepared by Liquid Source Misted
碩士 === 國立交通大學 === 電子工程系 === 90 === BaxSr1-xTiO3 thin films are highly promising storage dielectrics in DRAM applications because of their excellent electrical properties . In this thesis , we used the liquid source misted chemical deposition method (LSMCD) to deposit high quality BST thin...
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| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51111377425555351949 |