Formation of Ni Germano-Silicide on Single Crystalline Si0.3Ge0.7/Si

碩士 === 國立交通大學 === 電子工程系 === 90 === We have studied the Ni and Co germano-silicide on Si0.3Ge0.7/Si. The Ni germano-silicide shows a low sheet resistance of 4-6 / on both P+N and N+P junctions, which is much smaller than Co germano-silicide. Besides, small junction leakage currents of 3...

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Main Authors:	Wu Kuan Long, 吳冠龍
Other Authors:	Albert Chin
Format:	Others
Language:	zh-TW
Published:	2002
Online Access:	http://ndltd.ncl.edu.tw/handle/97151134833356358368

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spelling	ndltd-TW-090NCTU04280202015-10-13T10:04:16Z http://ndltd.ncl.edu.tw/handle/97151134833356358368 Formation of Ni Germano-Silicide on Single Crystalline Si0.3Ge0.7/Si 高鍺矽鍺之矽鎳化合物 Wu Kuan Long 吳冠龍碩士國立交通大學電子工程系 90 We have studied the Ni and Co germano-silicide on Si0.3Ge0.7/Si. The Ni germano-silicide shows a low sheet resistance of 4-6 / on both P+N and N+P junctions, which is much smaller than Co germano-silicide. Besides, small junction leakage currents of 310-8 A/cm2 and 210-7 A/cm2 are obtained for Ni germano-silicide on P+N and N+P junctions, respectively. The good germano-silicide integrity is due to the relatively uniform thickness as observed by cross-sectional TEM. Albert Chin 荊鳳德 2002 學位論文 ; thesis 30 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立交通大學 === 電子工程系 === 90 === We have studied the Ni and Co germano-silicide on Si0.3Ge0.7/Si. The Ni germano-silicide shows a low sheet resistance of 4-6 / on both P+N and N+P junctions, which is much smaller than Co germano-silicide. Besides, small junction leakage currents of 310-8 A/cm2 and 210-7 A/cm2 are obtained for Ni germano-silicide on P+N and N+P junctions, respectively. The good germano-silicide integrity is due to the relatively uniform thickness as observed by cross-sectional TEM.
author2	Albert Chin
author_facet	Albert Chin Wu Kuan Long 吳冠龍
author	Wu Kuan Long 吳冠龍
spellingShingle	Wu Kuan Long 吳冠龍 Formation of Ni Germano-Silicide on Single Crystalline Si0.3Ge0.7/Si
author_sort	Wu Kuan Long
title	Formation of Ni Germano-Silicide on Single Crystalline Si0.3Ge0.7/Si
title_short	Formation of Ni Germano-Silicide on Single Crystalline Si0.3Ge0.7/Si
title_full	Formation of Ni Germano-Silicide on Single Crystalline Si0.3Ge0.7/Si
title_fullStr	Formation of Ni Germano-Silicide on Single Crystalline Si0.3Ge0.7/Si
title_full_unstemmed	Formation of Ni Germano-Silicide on Single Crystalline Si0.3Ge0.7/Si
title_sort	formation of ni germano-silicide on single crystalline si0.3ge0.7/si
publishDate	2002
url	http://ndltd.ncl.edu.tw/handle/97151134833356358368
work_keys_str_mv	AT wukuanlong formationofnigermanosilicideonsinglecrystallinesi03ge07si AT wúguānlóng formationofnigermanosilicideonsinglecrystallinesi03ge07si AT wukuanlong gāoduǒxìduǒzhīxìnièhuàhéwù AT wúguānlóng gāoduǒxìduǒzhīxìnièhuàhéwù
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Formation of Ni Germano-Silicide on Single Crystalline Si0.3Ge0.7/Si

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