Design and Fabrication of RF Switch Devices by MEMS Technology
碩士 === 國立交通大學 === 電子工程系 === 90 === The thesis is focused on the exploration of how to improve the structure of RF switch devices on silicon structure by MEMS technology. A new process was designed to fabricate these MEMS switches. This process improves the sticking effect and stress on membrane. The...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51012072175609324172 |