Amorphous Low Dielectric Fluorinated Carbon Thin Film Grown from C6F6 by PECVD

Amorphous Low Dielectric Fluorinated Carbon Thin Film Grown from C6F6 by PECVD

碩士 === 國立交通大學 === 應用化學系 === 90 === Fluorinated amorphous carbon films can be used as low dielectric constant interlayer dielectric materials. The films are deposited by using hexafluorobenzene (C6F6) as the source gas and argon as the carrier gas by PECVD.

Bibliographic Details
Main Authors: Wan Cheng - Yu, 萬振宇
Other Authors: Chiu Hsin—Tein
Format: Others
Language:zh-TW
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/58237305570333380169
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spelling ndltd-TW-090NCTU05000622015-10-13T10:06:55Z http://ndltd.ncl.edu.tw/handle/58237305570333380169 Amorphous Low Dielectric Fluorinated Carbon Thin Film Grown from C6F6 by PECVD 以六氟苯經電漿輔助化學氣相沉積非晶型低介電含氟碳膜 Wan Cheng - Yu 萬振宇 碩士 國立交通大學 應用化學系 90 Fluorinated amorphous carbon films can be used as low dielectric constant interlayer dielectric materials. The films are deposited by using hexafluorobenzene (C6F6) as the source gas and argon as the carrier gas by PECVD. Chiu Hsin—Tein Chuang Shiow—Huey 裘性天 莊琇惠 2002 學位論文 ; thesis 48 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立交通大學 === 應用化學系 === 90 === Fluorinated amorphous carbon films can be used as low dielectric constant interlayer dielectric materials. The films are deposited by using hexafluorobenzene (C6F6) as the source gas and argon as the carrier gas by PECVD.
author2 Chiu Hsin—Tein
author_facet Chiu Hsin—Tein
Wan Cheng - Yu
萬振宇
author Wan Cheng - Yu
萬振宇
spellingShingle Wan Cheng - Yu
萬振宇
Amorphous Low Dielectric Fluorinated Carbon Thin Film Grown from C6F6 by PECVD
author_sort Wan Cheng - Yu
title Amorphous Low Dielectric Fluorinated Carbon Thin Film Grown from C6F6 by PECVD
title_short Amorphous Low Dielectric Fluorinated Carbon Thin Film Grown from C6F6 by PECVD
title_full Amorphous Low Dielectric Fluorinated Carbon Thin Film Grown from C6F6 by PECVD
title_fullStr Amorphous Low Dielectric Fluorinated Carbon Thin Film Grown from C6F6 by PECVD
title_full_unstemmed Amorphous Low Dielectric Fluorinated Carbon Thin Film Grown from C6F6 by PECVD
title_sort amorphous low dielectric fluorinated carbon thin film grown from c6f6 by pecvd
publishDate 2002
url http://ndltd.ncl.edu.tw/handle/58237305570333380169
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