Design and Fabrication of Half-Tone Mask to Generate Arbitrarily Shaped Microstructure for Microoptical Applications

碩士 === 國立交通大學 === 光電工程所 === 90 === We have developed a new technique of gray-scale masks by using half-tone techniques combined with the excimer laser micromachining. This technique can directly produce the microoptical elements with continuous surface relief on transparent polymer substrate, such a...

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Bibliographic Details
Main Authors: Yeh-En Chien, 簡葉恩
Other Authors: Han-Ping D. Shieh
Format: Others
Language:en_US
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/11598977435846682099