Design and Fabrication of Half-Tone Mask to Generate Arbitrarily Shaped Microstructure for Microoptical Applications
碩士 === 國立交通大學 === 光電工程所 === 90 === We have developed a new technique of gray-scale masks by using half-tone techniques combined with the excimer laser micromachining. This technique can directly produce the microoptical elements with continuous surface relief on transparent polymer substrate, such a...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2002
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Online Access: | http://ndltd.ncl.edu.tw/handle/11598977435846682099 |