Scrap Rules Determination for Small Lots in Wafer Fabrication

碩士 === 國立交通大學 === 工業工程與管理學程碩士班 === 90 === In semiconductor manufacturing, a typical wafer lot is composed of 25 wafers. Due to the yield problems, wafers in a lot may decrease in number during manufacturing. Such a lot is called a small wafer lot. The unit cost of manufacturing the wafers...

Full description

Bibliographic Details
Main Authors: Chie-Wun Chiou, 邱志文
Other Authors: Muh-Cherng Wu
Format: Others
Language:zh-TW
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/54520390516234126454