Research on the calibration of the PSA rotating element ellipsometer
碩士 === 國立交通大學 === 電資學院學程碩士班 === 90 === Ellipsometer measures the optical properties of material by measuring the changes of polarization state through the reflected light. Recently, it is proved that the measuring speed of the rotating polarizer/analyzer is faster than the conventional nu...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77947730131615769172 |