Laser direct writer with light intensity modulation
碩士 === 國立中央大學 === 機械工程研究所 === 90 === Traditionally, the diffractive optical element (ODE) is made by using the multiple binary-level lithography processes to enhance the diffractive efficiency. Due to the multiple exposures, the manufactory error will be included and more complicate processes is nee...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2002
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Online Access: | http://ndltd.ncl.edu.tw/handle/99858019108303321159 |