Laser direct writer with light intensity modulation

碩士 === 國立中央大學 === 機械工程研究所 === 90 === Traditionally, the diffractive optical element (ODE) is made by using the multiple binary-level lithography processes to enhance the diffractive efficiency. Due to the multiple exposures, the manufactory error will be included and more complicate processes is nee...

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Bibliographic Details
Main Authors: Mao-feng Du, 杜茂楓
Other Authors: S. J. Chen
Format: Others
Language:zh-TW
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/99858019108303321159