Laser direct writer with light intensity modulation

• Main Authors: Mao-feng Du, 杜茂楓
• Other Authors: S. J. Chen
• Format: Others
• Language: zh-TW
• Published: 2002
• Online Access: http://ndltd.ncl.edu.tw/handle/99858019108303321159

碩士 === 國立中央大學 === 機械工程研究所 === 90 === Traditionally, the diffractive optical element (ODE) is made by using the multiple binary-level lithography processes to enhance the diffractive efficiency. Due to the multiple exposures, the manufactory error will be included and more complicate processes is need to be considered. Therefore, to overcome these problems, the grey level mask can be used, in which only one exposure is needed to fabricate the optical element. This project presents that a laser machine with light intensity modulation to fabricate grey level masks. In the writer system, a solid-state laser with the power of 180 mw is used as the working light source. The processed target is laser direct write glass developed by the Canyon Material company. An acoustic-optics modulator (AOM) is used to modulate the laser intensity. To make sure the result of the processed mask, a measurement system is built. The laser direct writer system is already out of the binary methods to manufacture optical mask. The optical elements designer can use the LDW system to design any appropriate mask. Thus, the LDW system is a quite useful system for the ODEs.