The Investigation for Silicon Nitride Thin Film Deposited at Room Temperature
碩士 === 國立中央大學 === 光電科學研究所 === 90 === Advantage silicon nitride by CO2 laser assisted plasma enhanced chemical vapor deposition: low Si-H and N-H contained in a-SiNx:H film. Low surface roughness Prevent from moisture and oxidation Refraction index is stable Laser power will best assist at 40W. Stab...
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ndltd-TW-090NCU056140192015-10-13T10:12:40Z http://ndltd.ncl.edu.tw/handle/33445676531941039359 The Investigation for Silicon Nitride Thin Film Deposited at Room Temperature 室溫沈積高穩定性之氮化矽薄膜及其光激發光譜研究 Jia-Hung Suen 孫嘉鴻 碩士 國立中央大學 光電科學研究所 90 Advantage silicon nitride by CO2 laser assisted plasma enhanced chemical vapor deposition: low Si-H and N-H contained in a-SiNx:H film. Low surface roughness Prevent from moisture and oxidation Refraction index is stable Laser power will best assist at 40W. Stable PL spectra and higher efficiency none 李清庭 2002 學位論文 ; thesis 100 zh-TW |
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碩士 === 國立中央大學 === 光電科學研究所 === 90 ===
Advantage silicon nitride by CO2 laser assisted plasma enhanced chemical vapor deposition:
low Si-H and N-H contained in a-SiNx:H film.
Low surface roughness
Prevent from moisture and oxidation
Refraction index is stable
Laser power will best assist at 40W.
Stable PL spectra and higher efficiency
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none Jia-Hung Suen 孫嘉鴻 |
author |
Jia-Hung Suen 孫嘉鴻 |
spellingShingle |
Jia-Hung Suen 孫嘉鴻 The Investigation for Silicon Nitride Thin Film Deposited at Room Temperature |
author_sort |
Jia-Hung Suen |
title |
The Investigation for Silicon Nitride Thin Film Deposited at Room Temperature |
title_short |
The Investigation for Silicon Nitride Thin Film Deposited at Room Temperature |
title_full |
The Investigation for Silicon Nitride Thin Film Deposited at Room Temperature |
title_fullStr |
The Investigation for Silicon Nitride Thin Film Deposited at Room Temperature |
title_full_unstemmed |
The Investigation for Silicon Nitride Thin Film Deposited at Room Temperature |
title_sort |
investigation for silicon nitride thin film deposited at room temperature |
publishDate |
2002 |
url |
http://ndltd.ncl.edu.tw/handle/33445676531941039359 |
work_keys_str_mv |
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