Simulation and Characteristic Analysis of a Dual Frequency Capacitive Plasma Source
碩士 === 國立東華大學 === 電機工程學系 === 90 === none
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93338701082156360981 |