Design and Simulation of Langmuir Probe in Plasma Diagnostic System

碩士 === 國立東華大學 === 電機工程學系 === 90 === The electrical probe is called Langmuir probe, which is immersed in a plasma system to get important plasma information. Generally, the probe is connected by an adjustable voltage source (-50~+50 DC). The measured current collected by the probe is a function of th...

Full description

Bibliographic Details
Main Authors: Wen-Chieh Li, 李文傑
Other Authors: Bing-Hung Chen
Format: Others
Language:zh-TW
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/60557035098846968335