Investigation of Ligand Surface Chemistry: Implications for the Use of β-Diketonate Copper(I) Complexes as Precursors for Copper Thin-film Growth
碩士 === 國立中山大學 === 化學系研究所 === 90 === Two most useful families of copper CVD precursors that have been utilized widely are the Cu(I) and Cu(II) β-diketone complexes. The Cu(II)precursors require the use of an external reducing agent such as hydrogen to deposit copper films, i.e. CuII(β-diketonate)2 +...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2002
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/33430945007801439098 |