Combined magnetron sputtering and ECR-CVD deposition of diamond-like carbon films
博士 === 國立中山大學 === 電機工程學系研究所 === 90 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10337411982086473526 |