Combined magnetron sputtering and ECR-CVD deposition of diamond-like carbon films

Combined magnetron sputtering and ECR-CVD deposition of diamond-like carbon films

博士 === 國立中山大學 === 電機工程學系研究所 === 90 ===

Bibliographic Details
Main Authors:	Jen-Fung Chang, 張振福
Other Authors:	Tai-Fa Young
Format:	Others
Language:	zh-TW
Published:	2002
Online Access:	http://ndltd.ncl.edu.tw/handle/10337411982086473526

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