Numerical Simulation of the outlet effect for the MOCVD process.
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 90 === Abstract A method using CFD-based computer simulations as a virtual reactor was proposed for cost-effective CVD reactor design. The virtual reactor was developed by combining the chemical reactor mechanism and rate constants obtained from kinetic studies u...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92612635461041923047 |