The Design of a Etching Chamber for Semiconductor Process
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 90 === The Etching Chamber is the most important component of Etcher. It provides an environment to etch wafer and transfer wafer to another chamber by robotic arm. The purpose of this research is to solve some problem such as the huge deformation around the edge...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92953958592725416863 |