No-wait operation scheduling for wet bench machines
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 90 === Wet bench etchers have wide applications in semiconductor fabrications, duc to process chemical characteristics, each batch must be processed without any waiting between adjacent chemical processes. This “no-wait” characteristics created complexity in the dis...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19784753540393830803 |