The application of Pd nano-particles for copper seed layer electroless deposition in ULSI

碩士 === 國立清華大學 === 化學工程學系 === 90 ===

Bibliographic Details
Main Author: 蔡昕辰
Other Authors: 萬其超
Format: Others
Language:zh-TW
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/51450254370000343588