Diamond Synthesis and Silicon Etching in the Plasma Enhanced Systems
博士 === 國立清華大學 === 材料科學工程學系 === 90 === The applications of plasma techniques used in diamond synthesis and silicon etching have been investigated in this study. The Taguchi method and the response surface methodology (RSM) were used to analyze the effect of various control factors and optimize the pr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98738901207750895274 |