Studying the Rapid Growth Mechanism of Highly C-axis Oriented AlN by Inductively Coupled Plasma Chemical Sputtering
碩士 === 國立清華大學 === 材料科學工程學系 === 90 ===
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/51812920222775471897 |