The study of stress relaxation mechanisms in copper thin films
碩士 === 國立清華大學 === 材料科學工程學系 === 90 === Mechanical stresses in thin films are often significantly higher than those supported by the same material in bulk form. The thermomechanical behavior of metallic thin films on stiff substrates is relevant for thin film devices, but its mechanisms are...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86052052537628526905 |