Multi-level High-aspect Ratio Single Crystal Combdrive Actuator Using SOI Wafer and ICPRIE
碩士 === 國立清華大學 === 電子工程研究所 === 90 === Micro electrical mechanical system (MEMS), a technology to fabricate miniaturized sensors and actuators, has been growing at an exciting pace in recent years. Basically, MEMS can be divided into to two sorts. Surface micromachining is an additive pro...
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| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68367475984895560634 |