Design and Construction of a Micro-EDM System Based on EDM Waveform Distrimination
碩士 === 國立清華大學 === 工程與系統科學系 === 90 === LIGA process in MEMS is at present expensive and has brought pollution problem. In this study, a novel device provides functions with environmental protection and being a physical process is developed to promote MEMS technology. A micro EDM that is ba...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2002
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Online Access: | http://ndltd.ncl.edu.tw/handle/88373197613410934316 |