Design and development of an ultrasonic sliding stage
碩士 === 國立清華大學 === 工程與系統科學系 === 90 === In this paper, references regarding Langevin vibrators are surveyed. Related principles, their advantages and disadvantages are reviewed. Based on the above mentioned survey and innovative idea in this study, a new single direction motion ultrasonic sliding stag...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89944026482746570022 |