The Characterization and Fabrication of Pyroelectric Infrared Sensor with CMOS Amplifier and Application of Thermal Image Array
碩士 === 國立海洋大學 === 電機工程學系 === 90 === In this paper the integrated pyroelectric infrared sensors have been made using a Lead-Titanate (PbTiO3, PT) thin film by RF sputtering method on differential CMOS amplifier. In addition, the back etching technology is used to increase the sensitivity o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32152764326512065272 |