三族氮化物金屬-半導體-金屬光偵測器之製作
碩士 === 國立海洋大學 === 光電科學研究所 === 90 === In this thesis, the GaN, AlGaN, and InGaN compound semiconductors were all grown on sapphire by metalorganic chemical vapor deposition (MOCVD). And the fabricated metal-semiconductor-metal (MSM) photodetectors were compared with different parameters, including fi...
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Format: | Others |
Language: | zh-TW |
Published: |
2002
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Online Access: | http://ndltd.ncl.edu.tw/handle/72136885367547015379 |