The Farbrication of Polysilicon Thin Film Transistors by Copper Induced Crystallization
碩士 === 國立臺灣大學 === 電機工程學研究所 === 90 === The material properties and device characteristics of copper induced polysilicon thin film transistor are investigated. Polysilicon material has been prepared metal induced crystallization (MIC), and metal induced lateral crystallization (MILC). The...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/29230727734430690638 |