Fabrication of the Diffravctive Laser Optical Encoder System
博士 === 國立臺灣大學 === 機械工程學研究所 === 90 === Displacement measurement capabilities of high sensitivity and high ac-curacy have become one of the most important techniques to pursue research in sub-micrometer and nanometer fields. To engage in micro-machining research of VLSI and the precision machining st...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/03807999123336971562 |