Optimal Design of a Chiller Water Supply System in Semiconductor Factory
碩士 === 國立臺灣大學 === 機械工程學研究所 === 90 === The chiller water supply system occupies 40% of electrical usage in a typical semiconductor factory. It includes the electric consumption of pump, chiller, cooling tower, and fan. During the summer peak time at Taiwan, shortage in electricity becomes...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/97513358084926472699 |