Optimal Design of a Chiller Water Supply System in Semiconductor Factory

碩士 === 國立臺灣大學 === 機械工程學研究所 === 90 === The chiller water supply system occupies 40% of electrical usage in a typical semiconductor factory. It includes the electric consumption of pump, chiller, cooling tower, and fan. During the summer peak time at Taiwan, shortage in electricity becomes...

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Bibliographic Details
Main Authors: Yan-Shyang Lin, 林彥翔
Other Authors: Ci-Li Chen
Format: Others
Language:zh-TW
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/97513358084926472699
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Summary:碩士 === 國立臺灣大學 === 機械工程學研究所 === 90 === The chiller water supply system occupies 40% of electrical usage in a typical semiconductor factory. It includes the electric consumption of pump, chiller, cooling tower, and fan. During the summer peak time at Taiwan, shortage in electricity becomes more and more serious. Energy conservation in chiller water supply system becomes an important issue. Therefore, an optimization design of a chiller water supply system in semiconductor factor not only meets the requirement of design condition, it also shortens the initial and running cost to reach the energy conservation purpose. The chiller water system supplies the chiller water for manufacturing, air conditioning and wet bench etc. It is complicated in designing in order to satisfy the limitation of operation conductions, such as flowrates, velocities, water temperature, partial load operation and cost optimization. Traditional design uses the equal frictional method which does not follow the total pressure balance and cost optimization. In order to improve the traditional design method, this project intends to develop fluid mechanics design method, dynamics programming method and dynamics simulation method to give the optimized design in chiller water supply system. From the comparison of simulation results, detail discussion will provide for design reference. Partial load operation needs a variable speed pump to meet the chiller supply. A dynamic simulation model will also develop to study the different location arrangements for inverter pump to optimize the electrical usage and to reach the energy conservation purpose. A control strategy for chiller water supply system will also be documented for the designer reference.