Application of Model Order Reduction Algorithm on Lateral Viscous Damping Effects for MEMS
碩士 === 國立臺灣大學 === 機械工程學研究所 === 90 === A methodology of generating time-domain reduced-order models of viscous lateral damping effects for microsystems is presented in this thesis. Devices built with comb-drive mechanisms commonly have lateral motion in MEMS, and the shear stress results f...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/29213354967197527431 |