Application of Model Order Reduction Algorithm on Lateral Viscous Damping Effects for MEMS

• Main Authors: Po-Ching Yen, 顏柏青
• Other Authors: Yao-Joe Yang
• Format: Others
• Language: zh-TW
• Published: 2002
• Online Access: http://ndltd.ncl.edu.tw/handle/29213354967197527431

碩士 === 國立臺灣大學 === 機械工程學研究所 === 90 === A methodology of generating time-domain reduced-order models of viscous lateral damping effects for microsystems is presented in this thesis. Devices built with comb-drive mechanisms commonly have lateral motion in MEMS, and the shear stress results from the viscous of the air film surrounding the structure will cause the damping effects. Modeling of lateral viscous damping of 3-D geometries requires meshing the air films surrounding the moving structures, and thus needs considerable resources. The goal of this work is to develop a three-dimensional finite-difference-method (FDM) Stokes flow solver. The system matrices generated by the solver was then reduced to low order macromodels, which can be easily inserted into a system-level modeling package for transient and frequency analysis. The simulated results of the FDM Stokes solver and the reduced-order models are verified with the analytical solution. The reduced-order models require much less computational resources than the FDM models. By comparing the measured responses of comb-drives, the developed algorithm reasonably and properly estimates the lateral viscous damping effects.