Design and Experiment of Self-aligned Diffractive Laser Optical Encoder System
碩士 === 國立臺灣大學 === 應用力學研究所 === 90 === With worldwide science and technology attention rushes from micrometer world into sub-micrometer or even nanotechnology world, methodologies as-sociated with metrology in the sub-micrometer and nanometer displacement scale is getting ever more important. Displac...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/15516393963611214716 |