Development of Intelligent Pneumatic-Piezoelectric Hybrid Positioning Control System with Large stroke and Submicrometer Precision
碩士 === 國立臺灣科技大學 === 工程技術研究所自動化及控制學程 === 90 === The objective of this thesis is to develop an new intelligent pneumatic-piezoelectric hybrid positioning system for large stroke and submicrometer precision. The pneumatic cylinder is driven and controlled by the servo valve and the on-off valves respec...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60330488397613744815 |