Treatment of Polishing Wastewaters of Semiconductor Manufacturer by Ultrafiltration
碩士 === 國立臺灣科技大學 === 化學工程系 === 90 === The major objective of this study was to investigate treatment of polishing wastewaters from semiconductor manufacturer. Coagulation/flocculation and ultrafiltration were utilized in treating wastewaters from chemical mechanical polishing (CMP) and back-side grin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47833982299193120602 |