Surface Profile Reconstruction of Silicon Wafers Based on Optical Interference Fringes
碩士 === 國立臺灣科技大學 === 機械工程系 === 90 === This work studies the surface profile reconstruction of silicon wafers based on optical interference fringes. Following the developing of new technologies, leading wafer manufacturers focus their attention on the produce of large scale wafers. Surface flatness is...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50826990923307702073 |