Experimental Feasibility Study of Adopting Seismic Isolation Design for Microelectronics Facilitie
碩士 === 國立臺灣科技大學 === 營建工程系 === 90 === The total investment for a typical 12 inch IC fab in Taiwan may be as high as 100 billion Taiwanese dollars of which the cost of the production facilities and other supporting systems will be as high as 95%. Since the manufacturing facilities and their...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75489617564379116852 |