Synthesis of [002] oriented AlN films by reactive medium frequency sputtering
碩士 === 南台科技大學 === 電機工程系 === 90 === [002]-oriented aluminum nitride (AlN) is a promising piezoelectric material for surface acoustic wave (SAW) devices due to its high wave propagation speed and fairly large piezoelectric coupling factor. In this research, a special thin film growth techni...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94681513873343634923 |