Study On Aluminum Induce Recrystallization of amorphous Silicon by Field Assisted Thermal Crystallization for Low Temperature Poly-Si Thin Film Transistors Application
碩士 === 南台科技大學 === 電機工程系 === 90 === In this thesis, Aluminum Induced Crystallization (AIC) method was employed to crystallize a-Si films for low temperature Poly-Si TFT application. a-Si /Al/glass structures with various Si/Al thickness ratios were prepared using RF magnetron sputtering and were ther...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95177625316866335678 |