An Interferometer for measuring 3-D displacement of Micro-electro-mechanical System
碩士 === 國立臺北科技大學 === 光電技術研究所 === 90 === This thesis is aimed to develop a laser interferometer for simultaneous、non-contact measurements of U, V, and W of microelectromechanical system (MEMS). In this interferometer, a laser beam is incident and focused at a crossed-lined grating bonded on the 3-D mo...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/29196328777707042764 |