Study of the Triode and Diode-type Nano- Diamond-like Carbon Field Emitter Arrays by R.F.-PVD
碩士 === 國立臺北科技大學 === 機電整合研究所 === 90 === In this study, the nano-DLC thin films were deposited by R.F.-PVD and nano-diamonds target at low temperature. The area of deposition is larger than φ4" Si wafer. Furthermore, the field emission properties of the nano-DLC thin films are main part of this s...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/14034451978231750313 |