Airflow and Particle Characteristics of FOUP/LPU Minienvironment System for 300mm Wafer Manufacturing
碩士 === 國立臺北科技大學 === 冷凍與低溫科技研究所 === 90 === This thesis studies the airflow and particle characteristics of a FOUP/LPU (Front Opening Unified Pod / Load Port Unit) minienvironment system using both experiment and Computational Fluid Dynamics (CFD) techniques. The Stochastic Tracking Model, which inclu...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77114942706921039179 |