The Fabrication of Elcetrohydrodynamic Micro Pump
碩士 === 淡江大學 === 機械工程學系 === 90 === Abstract : This research was proposed to utilize MicroElectroMechanical System (MEMS) technology to fabricate ElectroHydroDynamic (EHD) micro pump, and expected to use it in micro cooling system with intelligent functions of new generation. Gold and Indiu...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/58474497405889611682 |