Design and Processing of A Low Actuation Voltage RF MEMS Switch
碩士 === 大同大學 === 機械工程研究所 === 90 === At present, the three-dimensional switches fabricated with microelectromechanical systems (MEMS) technology even has the disadvantage of high actuation voltage, which causes difficulty to combine with integrated circuit. In this the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47686944277232201921 |