Nanometer-Scale X-Ray Optical Diffraction Device
碩士 === 國立雲林科技大學 === 電子與資訊工程研究所碩士班 === 90 === The grating and zone plate of x-ray optics, were fabricated using scanning probe lithography (SPL) and e-beam direct writing respectively. We have demonstrated nanostructures of x-ray grating device with scanning probe lithography technique. Gr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12675048730287675971 |